Advancing Semiconductor Technology with BCE's Vented Hole Heater Chuck
Securing Your Wafers: BCE's Vented Hole Heater Chuck
When it comes to semiconductor manufacturing, precision and reliability are non-negotiable. That's why BCE's Vented Hole Heater Chuck plays a crucial role in ensuring the success of your processes. Let's dive into the key benefits that this innovative product offers:
Unwavering Wafer Stability
In the intricate world of semiconductor processing, wafers are subject to various steps and maneuvers. To maintain the utmost precision and consistency, wafers must stay firmly in place. Our Vented Hole Heater Chuck employs vacuum holes that generate a powerful suction force, keeping your wafer securely affixed to the chuck's surface. This means no more worries about unwanted movement or misalignment during processing, translating to precise, reliable results every time.
Eliminating Air and Gas Imperfections
Wafer surfaces and chucks, while engineered with the utmost care, may not always be perfectly flat or smooth. Microscopic imperfections, particles, or trapped air between the wafer and the chuck can spell trouble for the quality of your processes. BCE's Vented Hole Heater Chuck comes to the rescue by providing a channel for the escape of trapped air and gas. This ensures optimal contact between the wafer and the chuck, enhancing adhesion and minimizing any reduction in quality.
Optimized Heat Transfer
In critical processes such as wafer bonding and thin-film deposition, precise temperature control is paramount. The Vented Hole Heater Chuck excels in this regard as well. By ensuring improved and uniform contact between the wafer and the chuck, it facilitates efficient heat transfer. This is a fundamental requirement for semiconductor processes, where temperature control can make or break your desired outcome.
Defying Contaminants
The Vented Hole Heater Chuck doesn't stop at just securing your wafer; it also takes an active stance against contaminants. In semiconductor environments, even the tiniest particles, like dust or debris, can compromise the end product. Our vented vacuum holes act as a barrier, preventing the entrapment of such contaminants between the wafer and the chuck. This significantly boosts the cleanliness of your process, reducing the risk of defects or contamination on the wafer's surface.
BCE's Vented Hole Heater Chuck is your trusted partner in the semiconductor industry, offering rock-solid stability, impeccable heat transfer, and stringent contamination prevention. With this 4" wafer heater chuck, you can maintain a secure connection between your wafer and the chuck while ensuring the removal of air and gas, all in the pursuit of top-tier precision and quality. In the world of semiconductor manufacturing, this level of precision and cleanliness is the bedrock for producing high-quality devices that meet and exceed industry standards. Trust in BCE's Vented Hole Heater Chuck to elevate your semiconductor processes to the next level of excellence.
21060 Corsair Blvd. Hayward, CA 94545
510-274-1990
https://bcemfg.com
Precision Electric Heaters, Thermal Solutions, and Vacuum Feedthroughs
In the fast-paced world of high-tech industries, one-size-fits-all is a myth. BCE understands this. That's why we specialize in custom electric heaters, thermal solutions, and vacuum feedthroughs, meticulously designed to meet the exacting demands of the semiconductor, space, aerospace, packaging, analytical instrument, and medical instrument industries. BCE's custom vacuum feedthroughs ensure pristine, uncompromised connections, anchoring your operations in reliability.
Aerospace & Space, Semiconductor, Analytical & Medical Instruments, Packaging Industry
Pushing the boundaries of exploration demands tools that can withstand the challenges. BCE's products are engineered to perfection, ensuring they function seamlessly even in the harshest conditions of outer space. In industries where micrometers make a difference, BCE delivers. Our custom electric heaters and vacuum feedthroughs are at the heart of groundbreaking discoveries. From rockets to semiconductor machines to medical instruments to packaging, we design products that enhance efficiency, speed, and reliability, ensuring your packaging operations run like a well-oiled machine.
Specialized Heater and Feedthrough Solutions
Our prowess in serving diverse industries is a testament to BCE Mfg. 's engineering brilliance and commitment to innovation. Our solutions aren't just products but enablers - paving the way for advancements, discoveries, and progress.
Your Challenge. Our Solution. Let's innovate together.
Revolutionizing Air Pollution and Emission Reduction with BCE's Clean Flow Heater
Air pollution is a global crisis that affects the health of millions of people and contributes to climate change. Organic waste management is another pressing issue, as improper disposal can release methane, a potent greenhouse gas. Addressing these challenges requires innovative solutions, and cutting-edge technologies are emerging as essential tools in this battle. One such technology that stands out is the air circulation heater, a crucial component within a more extensive system designed to combust organic materials while mitigating harmful emissions efficiently. BCE's Clean Flow Heater is a prime example of this technology, pivotal in revolutionizing how we tackle air pollution and emission reduction.
BCE's Clean Flow Heater: A Game Changer
The Clean Flow Heater by BCE is an advanced air circulation heater that provides precise temperature control and uniform heating and ensures efficient combustion of organic materials, which is crucial to reducing waste volume and destroying harmful organic compounds. The precision and uniformity of heating also help to optimize the performance of pollution control devices, such as catalytic converters and selective catalytic reduction units, which are essential for mitigating emissions of harmful gases like nitrogen oxides, carbon monoxide, and volatile organic compounds.
Advantages of Electric Heating
Electric heating elements, like the Clean Flow Heater, offer several advantages over traditional fossil fuel-based heating systems:
- They provide precise temperature control, which is crucial for catalytic conversion and selective catalytic reduction.
- Electric heating is often more energy-efficient than burning fossil fuels for heat.
- Electric heating elements can be designed to fit into various pieces of equipment and can be easily controlled to provide the required heat.
- Using electricity for heating can result in lower emissions of pollutants, mainly if the electricity is generated from renewable sources.
While the Clean Flow Heater is a critical component in the fight against air pollution and emissions, it is part of a more extensive system that includes various equipment and processes, such as incinerators, regenerative thermal oxidizers, catalytic converters, and selective catalytic reduction units. These systems work together to efficiently combust organic materials, capture pollutants, and convert harmful gases into less toxic substances like carbon dioxide and water vapor. Implementing a holistic approach that combines advanced technologies like the Clean Flow Heater with other pollution control equipment and processes is essential for effectively tackling air pollution and emission reduction.
Innovative technologies like BCE's Clean Flow Heater are playing a pivotal role in the fight against air pollution and the effective management of organic waste. By providing precise temperature control and uniform heating, the Clean Flow Heater helps to optimize the combustion of organic materials and the performance of pollution control devices, which, in turn, contributes to reducing the volume of waste, destroying harmful organic compounds, and mitigating emissions of toxic gases.
BCE
The BCE Hi-Temp Puck Heater
Introducing the Hi-Temp Puck Heater
The demand for high temperature applications in various industries such as vacuum chambers, laboratories, green energy, and 3D printing has led to the development of the innovative Hi-Temp Puck Heater. Designed to deliver exceptional performance and precision, this compact heating solution is capable of reaching temperatures up to an impressive 1,000°C, with intermittent temperatures exceeding 1,100°C.
Unmatched Performance and Reliability
One of the key highlights of the Hi-Temp Puck Heater is its remarkable temperature range, spanning from 50°C to +1,000°C, making it suitable for a wide range of industrial applications. Whether you need consistent high heat or intermittent bursts of extreme temperature, this heater has got you covered with a built-in thermocouple for precise temperature control.
Constructed with high-grade stainless steel, the Hi-Temp Puck Heater ensures durability and longevity. Its compact design, measuring just 2.5" in diameter and 0.56" thick, allows for easy integration into existing systems without compromising space or efficiency.
Versatile Flange Options
To accommodate different setups and requirements, the Hi-Temp Puck Heater offers stainless steel CF or KF flanges in various sizes. This versatility ensures seamless compatibility with a range of vacuum chambers and other industrial equipment.
Reliable Testing and Certification
Prior to shipping, each Hi-Temp Puck Heater undergoes rigorous testing to ensure quality and reliability. The heaters are subjected to vacuum and helium leak tests, guaranteeing their suitability for high-pressure and demanding environments. Furthermore, the units undergo a 700VDC hi-pot test with a 1mA current leakage inspection to ensure electrical safety. With a resistance of 5mΩ at 500VDC, these heaters are built to perform consistently and reliably.
Unprecedented Heating Performance
In a recent application conducted at our BCE Lab in Hayward, California, we put the Hi-Temp Puck Heater to the test. The customer's specific requirements called for rapid heating and temperature stability. To exceed expectations, we pushed the heater to its limits, achieving an impressive ramp-up from 27°C to 1,000°C in just 15 minutes. This remarkable heating capability was facilitated by a 1" thick ceramic fiber insulation, ensuring optimal heat retention. Even more impressive, the heater maintained a steady temperature of 1,000°C for a duration of one hour, with intermittent temp to 1,100°C. You can witness the exceptional performance of the Hi-Temp Puck Heater in action by watching the video below.
https://bcemfg.com
510-274-1990
Compression Fitting Feedthrough: A Versatile Solution for Tube and Thermocouple Feedthroughs
Background:
Vacuum chambers often require tube and thermocouple feedthroughs that allow for specific distances during installation. To address this need, we offer a compression fitting solution, empowering our customers with control over the distance in their installations. Through extensive experimentation, we have designed a feedthrough that enables the maximum quantity of 1/8" compression fittings in a standard KF40 and KF50 flange, while still providing enough distance for necessary compression and disassembly.
Scope:
- Compressible vacuum flange offers the following features:
- Temperature range: 0°C to +180°C (limited by O-ring's maximum temperature capacity)
- Material: Stainless steel 304
- 1/8" compression fitting with a 7/16" hex bored through
- Compression of any 1/8" diameter tubing or sensor
- 304 stainless steel KF40 and KF50 flanges
- He Leak Tested to achieve a leak rate of 1 x 10¯⁸ ATM, CC/sec or better (leak rate after compression depends on the material and wall thickness of the tubing, as well as the strength of compression)
Outcome:
By utilizing a reusable feedthrough, end users can effortlessly introduce new sensors into their systems while maintaining vacuum integrity. These compression fitting feedthroughs provide the flexibility and convenience needed for seamless installations.
For more information visit https://bcemfg.com/article_309_Compression-Fitting-Feedthrough.cfm.
The Critical Role Vacuum Feedthroughs Play in Industry
Vacuum feedthroughs are vital in various industries that require maintaining a vacuum environment while transferring materials, data, or energy through the vacuum barrier. Key industries include:
- Semiconductor Manufacturing: Vacuum feedthroughs are essential for maintaining a controlled environment while producing integrated circuits, photovoltaic cells, and other semiconductor devices.
- Aerospace and Space Research: Vacuum feedthroughs are used in space simulation chambers, vacuum testing of spacecraft components, and satellite testing, ensuring the integrity of the vacuum environment and enabling data and power transmission.
- Pharmaceutical and Biotechnology: Vacuum feedthroughs are used in vacuum-based processes such as lyophilization (freeze-drying), vacuum distillation, and sterilization, ensuring the transfer of materials and data without compromising the vacuum environment.
- High-Energy Physics Research: Vacuum feedthroughs are crucial in particle accelerators, such as the Large Hadron Collider (LHC), where they allow the transfer of electrical signals, cooling fluids, and other materials while maintaining a high-vacuum environment.
- Thin Film Deposition and Surface Science: Vacuum feedthroughs are used in vacuum-based processes like physical vapor deposition (PVD), chemical vapor deposition (CVD), and sputtering to ensure the transfer of materials, data, and power without affecting the vacuum.
- Materials Science: Vacuum feedthroughs are used in various material processing techniques, such as vacuum annealing, vacuum brazing, and vacuum sintering.
- Electronics and Optoelectronics: Vacuum feedthroughs are essential for maintaining a vacuum environment during the manufacturing and testing various electronic and optoelectronic components, including vacuum tubes, sensors, and detectors.
- Nuclear Research and Fusion: Vacuum feedthroughs are used in nuclear research facilities and fusion reactors to transfer data, power, and materials while maintaining a vacuum environment.
These are just a few examples of industries where vacuum feedthroughs play a crucial role, but there are also many other applications. BCE specializes in crafting premium vacuum feedthroughs tailored to various applications and industries. Our expert engineers bring decades of design and development know-how, amassing an invaluable empirical data and insights repository. At BCE, we are eager to accommodate your unique feedthrough needs, ensuring that our custom-designed solutions effectively address your most demanding challenges.
BCE
+1 510-274-1990
Vacuum Heater Platens
Vacuum heater platens, also known as vacuum heating plates or vacuum hot plates, are heating devices used in various industries for temperature-controlled processing, such as in semiconductor, aerospace, and composite material manufacturing. These devices combine a heating element with a vacuum system to create a controlled environment for processing materials.
Vacuum heater platens typically contain a flat metal plate with integrated heating elements and a vacuum system. The heating elements provide uniform temperature distribution across the surface of the platen, while the vacuum system creates a sealed environment that can maintain specific pressure levels.
These heaters are used for applications that require precise temperature control and a vacuum environment, such as:
- Semiconductor manufacturing: Vacuum heater platens are used to heat wafers during various processing stages to ensure uniform temperature distribution and prevent contamination from particles in the air.
- Composite material manufacturing: Vacuum heater platens are used in the curing process of composite materials, providing uniform temperature and pressure, which is crucial for achieving optimal material properties.
- Aerospace industry: Vacuum heater platens are used for bonding and curing processes of various components, such as carbon fiber composites, in aircraft and spacecraft manufacturing.
Vacuum heater platens help improve product quality and reliability by providing a controlled environment for temperature-sensitive processes.
BCE
+1 510-274-1990
HEM Sealed Heater™ - Bench Test to 250°C
In addition to optimizing liquid flow in space launches, more research and design facilities require a heater that will work in vacuum without outgassing the internal resistor and insulating materials. Materials such as chromium and particles from the magnesium oxide begin to outgas. Placing a vacuum barrier that keeps these particles in place and allows the operator to process without consistently replacing heaters, should increase productivity.
HEM Sealed Heater™/ Vacuum Chambers:
- Temperature range of -55⁰C to +200⁰C Sheath Temperatures
- Stainless steel 321 for heated zone, 304 Hem Sealed Cap
- 18AWG to 32AWG Kapton®/polyimide Lead wires
- 500Watt (± 10%) , 240 Volt, 1-phase
- He Leak Tested = 5 x 10¯⁹ ATM, CC/sec or better
- Hi-Pot Test 1K*2E 1 2 seconds (1500-2250VDC 0.5mA)
- Meg-Ohm 20 to 4,000+ @ 500VDC
OUTCOME:
This test was performed in atmosphere within a 3.5 hour time frame. The temperature was held each hour after the initial ramp to sheath temperature as noted in the graph below.
The temperature of 200°C was held for the 2nd hour and then the heater was powered ~250°C and held until the test was complete after about 3.5 hours.
At lower temperatures of ~200°C, the Hem Sealed™ Cap reached 60°C keeping the vacuum integrity as per the maximum heater transition temp of 70°C. The maximum temperature on the sheath tested was to 250°C with the Hem Sealed™ Cap at 79°C.
Special note; if a heater block or other device being heated, the optimal bore diameter vs heater diameter for the best heat transfer should be +.0020” to +.0025”.
The Role of Vacuum Feedthroughs
Vacuum feedthroughs are devices that are used to allow electrical, optical, or fluid connections to pass through a vacuum chamber wall. They are essential in high vacuum applications because they allow for the passage of electrical power, control signals, and other types of data into and out of the vacuum chamber while maintaining the integrity of the vacuum.
There are several reasons why vacuum feedthroughs are important in high vacuum applications. First and foremost, they allow for the passage of electrical power and control signals into the vacuum chamber, which is necessary for operating many types of equipment and instruments that are used in high vacuum environments. For example, electrical feedthroughs can be used to power a vacuum pump, while optical feedthroughs can be used to transmit data from sensors or cameras that are located inside the vacuum chamber.
In addition to electrical and optical connections, vacuum feedthroughs can also be used to transport fluids, such as coolants or process gases, into or out of the vacuum chamber. This is particularly important for applications that require temperature control or precise gas delivery, such as in the case of thin film deposition or material processing.
Another important aspect of vacuum feedthroughs is that they can be designed to minimize the amount of outgassing that occurs, which is the release of gas from the feedthrough material into the vacuum chamber. This is important because outgassing can contaminate the vacuum environment, potentially causing damage to the equipment or samples inside the chamber.
Lastly, vacuum feedthroughs must be designed to withstand the high vacuum conditions and operate efficiently and reliably. These feedthroughs typically consist of a metal or ceramic stem with an epoxy, glass or ceramic seal that allows the electrical, optical, or fluid connection to pass through the vacuum chamber wall. The feedthrough stem must be sealed to the vacuum chamber wall without leaking, while the electrical, optical, or fluid connections must maintain their integrity under the high vacuum conditions.
In summary, vacuum feedthroughs play a crucial role in high vacuum applications, by allowing electrical, optical, or fluid connections to pass through the vacuum chamber wall while preserving the high vacuum condition. They also play a important role in controlling temperature, providing gases and maintain the integrity of the electrical, optical and fluid connections.
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