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An instructional blog about specialized electric heating elements and vacuum feedthroughs for the OEM, analytical, semiconductor, aerospace, pharmaceutical, chemical, water, environmental, food processing, and alternative energy markets. Please feel free to contact us at (510) 274-1990 with any questions. BCEmfg.com
Custom Epoxy Vacuum Feedthroughs - A Great Alternative
Posted by
Belilove Company-Engineers
Labels:
ceramic,
epoxy,
feedthrough,
metal,
semiconductor,
vacuum
Common Ways to Electrically Heat a Semiconductor Chuck - The Basics
A semiconductor wafer platform, know as a chuck, is used to support and hold in place (usually by means of applied vacuum), a silicon wafer. A chuck heater is used to uniformly and accurately distribute heat (and cooling) to a semiconductor wafer chuck. This is done during the manufacturing, characterization, testing, and failure analysis of semiconductor wafers.
Semiconductor wafers contain many electronic devices or electronic circuits, known as dies. Each die has to be carefully tested through a range of temperatures. Precise and uniform temperature control is a requirement. The simplest, and most common way to apply heat (and cooling) is through a chuck incorporating an electric resistance heating element.
Semiconductor wafers contain many electronic devices or electronic circuits, known as dies. Each die has to be carefully tested through a range of temperatures. Precise and uniform temperature control is a requirement. The simplest, and most common way to apply heat (and cooling) is through a chuck incorporating an electric resistance heating element.
Posted by
Belilove Company-Engineers
Labels:
chuck heating,
CVD,
LPCVD,
PECVD,
plasma etch,
semiconductor,
wafer
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