Saturday, January 16, 2021

150mm 6” Stainless Vacuum Heater Chuck

150mm 6” Stainless Vacuum Heater Chuck

BACKGROUND

An ALD chamber needed to be upgraded to a higher temperature platen, beyond the limits of aluminum.  The application involved reducing the cost of a replacement vacuum heater while keeping the heat transfer and uniformity the same or better in vacuum.  Vacuum integrity was crucial to the success of the project since it needed to comply with the existing vacuum heater chuck being replaced. 

SCOPE

  • 150mm 6” Stainless Vacuum Heater following specs: 
  • Temperature up to 450°C (+/- 1%) 30 minutes or less  
  • 304 SS 2.75 CF Flange Feedthrough with Viton O-ring  
  • 108 mtorr, pass best config. baseline (~0.4 torr/min) 
  • 120 Volt, 950 Watt (+/-10%), 8 Amp 
  • Thermocouple built-in to heater source
  • Surface Finish: 32 Ra 

OUTCOME

  • BCE 6” Vacuum Heater Chuck
  • Medium vacuum compatible
  • Leak-up rate test for the best tool config (~0.4 torr/min).
  • Good temperature uniformity over 6” dia, up-to 450°C.
  • Within ± 2.5°C over most of the wafer, except the edges of a 6” dia.
  • Repeatable and Predictable temperature  ramps up-to 450°C

BCE
510-274-1990

Sunday, January 10, 2021

120-volt Socket Vacuum Feedthroughs

120-volt Socket Vacuum Feedthroughs

Vacuum equipment usually requires transferring electrical currents, voltages, and signals or fluids through the equipment walls. BCE provides a wide range of feedthroughs that serve as solutions to various requirements for vacuum equipment installations.

One unique design is the 120-volt Socket Feedthrough. It's designed to replace bulky power wiring and reduce clutter located in and around a vacuum chamber.  A three-slot single female receptacle precisely fitted into an adapter with a KF50 flange or 1-1/4" NPT connection. This feedthrough is an optimal solution to reduce the size and increase efficiency. With this design, users can relocate the power system to the chamber's exterior, increasing the available space within the vacuum chamber while maintaining the desired vacuum rating.

BCE's epoxy chemical adhesion, the most robust mechanism of any adhesive bond, make the seal possible.  The viscoelastic nature of the epoxy absorbs vibrations and allows for a better performance by reducing fatigue.

BCE's innovative product is just what you need for a fast and easy 120-volt socket available on the other side of the vacuum wall. They provide a standard 120V, 15 amp socket for a quick, reusable connection. Custom configurations are available.

BCE
510-274-1990