The Critical Role Vacuum Feedthroughs Play in Industry

Vacuum feedthroughs are vital in various industries that require maintaining a vacuum environment while transferring materials, data, or energy through the vacuum barrier. Key industries include:

1. Semiconductor Manufacturing: Vacuum feedthroughs are essential for maintaining a controlled environment while producing integrated circuits, photovoltaic cells, and other semiconductor devices.
2. Aerospace and Space Research: Vacuum feedthroughs are used in space simulation chambers, vacuum testing of spacecraft components, and satellite testing, ensuring the integrity of the vacuum environment and enabling data and power transmission.
3. Pharmaceutical and Biotechnology: Vacuum feedthroughs are used in vacuum-based processes such as lyophilization (freeze-drying), vacuum distillation, and sterilization, ensuring the transfer of materials and data without compromising the vacuum environment.
4. High-Energy Physics Research: Vacuum feedthroughs are crucial in particle accelerators, such as the Large Hadron Collider (LHC), where they allow the transfer of electrical signals, cooling fluids, and other materials while maintaining a high-vacuum environment.
5. Thin Film Deposition and Surface Science: Vacuum feedthroughs are used in vacuum-based processes like physical vapor deposition (PVD), chemical vapor deposition (CVD), and sputtering to ensure the transfer of materials, data, and power without affecting the vacuum.
6. Materials Science: Vacuum feedthroughs are used in various material processing techniques, such as vacuum annealing, vacuum brazing, and vacuum sintering.
7. Electronics and Optoelectronics: Vacuum feedthroughs are essential for maintaining a vacuum environment during the manufacturing and testing various electronic and optoelectronic components, including vacuum tubes, sensors, and detectors.
8. Nuclear Research and Fusion: Vacuum feedthroughs are used in nuclear research facilities and fusion reactors to transfer data, power, and materials while maintaining a vacuum environment.

These are just a few examples of industries where vacuum feedthroughs play a crucial role, but there are also many other applications. BCE specializes in crafting premium vacuum feedthroughs tailored to various applications and industries. Our expert engineers bring decades of design and development know-how, amassing an invaluable empirical data and insights repository. At BCE, we are eager to accommodate your unique feedthrough needs, ensuring that our custom-designed solutions effectively address your most demanding challenges.

BCE

https://bcemfg.com

+1 510-274-1990

Vacuum Chamber Heater Platen 350mm

BACKGROUND 

Find a solution in a Vacuum Chamber for the testing and processing of silicon and glass components ~650⁰C.  The heater surface, 350mm x 300mm x 12.7mm thick, was flat with no lift pin holes or gates to hold the product in place.   The long length cold pin section exiting from the center of the heater to the flange, needed to be long enough to exit into the atmosphere.  A slotted designed bottom plate was welded to keep the heat source in place and increase heater efficiency.  

SCOPE

The Vacuum Heater Platen:

• Temperature 650⁰C-700⁰C  
• 18” Long cold pin section with CF Vacuum Flange  on the bottom 
• Helium Leak rate of 1 x 10̄¯9 cc/sec He on CF Flange only 
• 300mm x 350mm x 12.7mm thick for silicon and glass products 
• Thermocouple built-in for over-temp protection or control  
• 2,400  Watt (± 10%) , 240 Volt
• Mounting threads on the bottom of the assembly  
• Material:  304 Stainless Steel 

OUTCOME

The Vacuum Heater Platen was ramped to 650⁰C at 75% of power (1800 watt) in atmosphere with a ceramic fiber insulation cover.  After a 1 hour ramp, the heater reached 650⁰ C and was turned off to let cool.    There was discoloration on the top surface, however this is expected in atmosphere at this temperature.  The electrical specifications were checked again and the heater was cleaned & packaged for delivery.  

BCE

https://bcemfg.com

+1 510-274-1990

120-volt Socket Vacuum Feedthroughs

Vacuum equipment usually requires transferring electrical currents, voltages, and signals or fluids through the equipment walls. BCE provides a wide range of feedthroughs that serve as solutions to various requirements for vacuum equipment installations.

One unique design is the 120-volt Socket Feedthrough. It's designed to replace bulky power wiring and reduce clutter located in and around a vacuum chamber.  A three-slot single female receptacle precisely fitted into an adapter with a KF50 flange or 1-1/4" NPT connection. This feedthrough is an optimal solution to reduce the size and increase efficiency. With this design, users can relocate the power system to the chamber's exterior, increasing the available space within the vacuum chamber while maintaining the desired vacuum rating.

BCE's epoxy chemical adhesion, the most robust mechanism of any adhesive bond, make the seal possible.  The viscoelastic nature of the epoxy absorbs vibrations and allows for a better performance by reducing fatigue.

BCE's innovative product is just what you need for a fast and easy 120-volt socket available on the other side of the vacuum wall. They provide a standard 120V, 15 amp socket for a quick, reusable connection. Custom configurations are available.

BCE

510-274-1990

https://bcemfg.com

Epoxy Feedthroughs: Fast, Flexible, Affordable

During the past decade, new epoxy compounds have been developed that rival glass and ceramic in performance. BCE is at the forefront of this development.

With modern epoxy feedthroughs, any kind of standard or custom connector is sealed in a completely potted, high-performance, clear epoxy compound. Epoxy seals offer countless design options, and most amazingly, performance equal to or better than glass or ceramic. Better yet, pricing is very competitive and quick turn-around for prototypes and short production runs are not a problem.

FAST PROTOTYPES
BCE can provide custom prototypes for your design with high vacuum performance for today's fast moving markets.

PRINTED CIRCUIT BOARD, FLANGED OR THREADED CONNECTIONS
Wide variety of standard and custom mounting options for epoxy vacuum feedthroughs.

FEWER COMPONENTS, INCREASED RELIABILITY
Fewer components and connectors, often reducing 5 components to 1, BCE epoxy feedthroughs also eliminate multiple potential failure points.

CERTIFIED LOW OUTGASSING
BCE feedthroughs meet NASA outgassing requirements. BCE vacuum leak checks 100% of feedthroughs.

Vacuum Feedthrough FAQ

What is a vacuum chamber?

It is an enclosure in which a low pressure or vacuum environment is created through the removal of air and gases.

What is a feedthrough?

Feedthroughs are electro-mechanical devices that provide leak-proof electrical and pressure connections into a vacuum chamber.

What is a hermetic seal on a feedthrough?

It provides an airtight seal against contaminants entering a vacuum chamber. Contaminants can include gases and fluids like moisture, humidity, and chemicals.

What processes are used to provide a hermetic seal?

Hermetic seals are generally processed in furnaces under regulated temperatures and pressures. They can be glass-to metal, ceramic-to-metal or epoxy based.

What metric is used to assess the hermeticity of a feedthrough?

Feedthroughs generally undergo helium leak checks to establish the helium leak rate, an indicator of the feedthroughs’ vacuum compatibility. Prior to a helium leak check, feedthroughs are visually inspected for cracks, damage and porosity in the seal.

What is the NASA ASTM E595 standard?

This standard pertains to epoxies that exhibit low Total Mass Loss and Collected Volatile Condensable Materials during Outgassing in a vacuum environment.

For information on vacuum feedthroughs, contact BCE by calling 510-274-1990 or by visiting the BCE website - https://bcemfg.com

BCE’s Vacuum Ring Heater: Defying Boundaries in Degassing Chambers

BCE Vacuum Ring Heater

Providing uniform heat to semiconductor devices in degassing chambers is essential in extracting impurities. This can only be achieved if a heating device has the proper fit and temperature uniformity for a given chamber. It is for this very application that BCE was approached by a large semiconductor company from Silicon Valley. In order to heat this company’s semiconductor wafers, it was critical that the heating device be manufactured to fit precisely into a large and circular degassing chamber posing manufacturing challenges due to dimensional and application parameters. BCE was able to provide extensive design consultations, 3D CAD modeling and lean manufacturing capabilities to this semiconductor giant at a competitive price. All these services were rendered while catering to all requirements needed to successfully manufacture their products.

SCOPE

The heating apparatus needed to satisfy the following criteria:

• Vacuum compatibility to 10^-8 Torr 
• Maximum Operating Temperature: 200°C 
• Temperature uniformity of ±4% at 150°C 
• Operate at 1500W, 240V 
• All epoxies used needed to meet NASA’s Low Outgassing Spec (ASTM E595) 
• Reduced contamination from components inside chamber 
• Temperature sensing capability 
• Circular configuration between 34 and 36 inches in diameter 
• Height of part was not to exceed 1 ft. 
• Effective heat transfer from heating device with reduced machining cost 

OUTCOME

BCE’s Vacuum Ring Heater proved to be the ideal product for this application. Its strong aluminum ring construction ensured effective heat transfer to the circular wafers while keeping manufacturing costs low. Furthermore, its strategically embedded heater with stainless steel sheath allowed the device’s temperature uniformity to remain at ±2% at 150°C, greatly exceeding customer requirements. Moreover, BCE’s proprietary epoxy meeting NASA’s low outgassing spec was used as the primary sealant and KAPTON insulated leads were provided for the heater and integrated thermocouple to reduce contamination. In fact, the integrated thermocouple type K further served to monitor the temperature supplied to the chamber. Finally, all electrical, vacuum and dimensional requirements were met to provide the most optimal thermal environment.

Visit this link for more information on the Vacuum Ring Heater, or call (510) 274-1990.

Example of a Large Vacuum Chamber Used at NASA

Facility 238 is a large, vertical, cylindrical thermal vacuum chamber which is used for thermal vacuum and thermal balance testing, and baking out spacecraft hardware. Test articles are normally loaded through the top of the chamber using the building crane; however, small payloads can be transported through the personnel entrance. Ports for electrical feedthroughs, liquid/gas feedthroughs, and viewing are located around the perimeter of the chamber. A clean tent at the chamber entrance provides class 10,000 cleanliness conditions.

Mode of Operation

With the chamber dome rolled back, the overhead crane is used to lower the payload onto the support fixture. In most cases, special fixturing must be designed due to the uniqueness of the test article support system. Once installed, the payload is instrumented and connected to the ground support equipment via feedthroughs. Access to the chamber is throught a clean tent. The use of cleanroom procedures and the wearing of clean garments are required when working in the chamber.

Initial chamber evacuation is provided by two rotary piston mechanical pumps, with four closed cycle cryopumps for high vacuum pumping. Each cryopump is isolated from the chamber by a sliding gate main valve to allow off-line cool down and regeneration.

Parameters

• Test Pressure: 5 x 10-7 mmHg
• Shroud Temperature: GN2 mode -90°C to +90°C , LN2 mode -190°C
• Chamber Pump: 4 cryopumps

Physical Characteristics

• Test Volume: 12' x 15'
• Payload Support: Floor level - 4' square platform
• Side Wall: Hardpoints at 6' and 12' levels
• Crane Capacity: 5 tons Viewports: 9" diameter
• Standard Electrical Feedthroughs: 36 - 37 pin connectors (RF feedthroughs available on request)

Integral Instrumentation

• Pressure: Capacitance manometer - Atm to 10-3 mmHg
• Ion Gauge: 10-3 mmHg to ultimate
• Payload Temperature: 324 channels of thermocouple or thermistor channels
• Contamination Monitor: TQCM, coldfinger, residual gas analyzer

Epoxy Vacuum Feedthroughs Engineered for Your Application

A short introduction to BCE's custom epoxy feedthrough capabilities.

BCE Epoxy Vacuum Feedthroughs: When You Need to Pass a Signal Through A Vacuum Chamber Wall

Equipment manufacturers and scientific researchers are continually challenged with supplying power, fiber-optic, control, and monitoring cables into (and out of) sealed vacuum vessels. Whether due to space restrictions, special geometries, or number and type of conductors, standard glass-to-metal or ceramic feedthroughs never quite fit the bill. Unfortunately, because of limited options, many designers are forced to compromise and go for an off-the-shelf solution.

You don't have to compromise anymore.  EPOXY TO THE RESCUE. 

During the past decade, new epoxy compounds have been developed that rival glass and ceramic in performance. BCE is at the forefront of this development and leverages modern epoxy's unique properties to solve your feedthrough challenges.

With modern epoxy feedthroughs, any kind of standard or custom connector is sealed in a completely potted, high-performance, clear epoxy compound. Epoxy seals offer countless design options, and most amazingly, performance equal to or better than glass or ceramic. Better yet, pricing is very competitive and quick turn-around for prototypes and short production runs are not a problem.

BCE custom epoxy vacuum feedthroughs offer the best choice in application flexibility, cost, and high performance. Epoxy feedthroughs are the right product for today’s fast moving markets. If you have to pass an electrical, pneumatic, or fiber-optic signal through a vacuum chamber wall, THINK OF BCE!

New BCE Expoxy Vacuum Feedthrough Video

Check it out ....

Epoxy Vacuum Feedthroughs for Medical Equipment, Analyzers, and R&D Laboratories

The challenges of getting data and
control sensors inside
vacuum equipment.

Scientists and researchers are continually challenged to come up with better ways to read data inside a vacuum environment. Traditional ceramic and glass-to-metal vacuum feedthroughs don’t offer the flexibility of design required. Unique varieties of control and data signals have to pass through the wall. Not only are electrical power and control signals being passed, but fiber optic cables and pneumatic tubing may be included. Ever changing variables, such as the number and types of connectors, unique geometries, and limited available space, make it very difficult to find an off-the-shelf feedthrough. As a result, designers have traditionally been forced to make compromises and specify a feedthrough with some, but not all, of the desired specifications.

Custom epoxy feedthrough by BCE

This reality has led to significant gains in custom epoxy feedthrough development. Epoxy feedthroughs overcome design restrictions. New epoxy properties have been developed that rival ceramic and glass in performance. High performance, clear epoxy potting opens the door for researchers to specify the exact number and type of wires, fiber optic cables, or any other insert they require.

Manufacturers of epoxy feedthroughs can provide a virtually limitless variety of wires, cables, or tubes along with the added benefit of fast prototyping and small production runs - perfect for the research and manufacturing community.

Epoxy vacuum feedthroughs are quickly becoming the preferred vacuum entry device because:

• Can accommodate custom conductors, angles, and shapes.
• Prototypes with the exact number and type of have fiber-optic cables, pneumatic tubing, or run wires.
• Electrical shielding is not a problem.
• Epoxy feedthroughs are cost-effective.
• Comply with outgassing specifications.
• Allow for visual inspection when clear epoxy used.
• Feedthroughs can be mounted directly to flexible circuits and printed circuit boards.
• Elimination of contact resistance.

With the development of epoxy feedthroughs medical device companies, analyzer manufacturers, laboratories, aerospace companies, and other R&D facilities can design their equipment based on optimal size, cost and performance, and not be forced to compromise by ceramic and glass-to-metal feedthroughs limitations.

Because of the constant pressure on vacuum equipment researchers and OEM designers for “better, faster, smaller”, it’s clear that epoxy feedthroughs provide flexibility and options which allow for more efficient and creative design.

For more information regarding epoxy vacuum feedthroughs, contact:
BCE
www.belilove.com
(510) 274-1990