Saturday, June 5, 2021

The Vertex Vacuum Feedthrough

Vertex Vacuum Feedthrough

High Vacuum Feedthrough for Tight Spaces

The new Vertex line of feedthroughs was born out of the necessity of making right-angle feedthroughs robust enough to handle the high vacuum requirements, voltage, amperage, pin dimensions, and challenging space constraints. BCE responded with the Vertex feedthrough.

The feedthrough utilizes precise beaded welds and multiple cure times of the BCE epoxy. After each cure, a vacuum leak test is performed to spec, ensuring feedthrough integrity. Chemical cleaning is BCE’s standard procedure for the Vertex.

Specifications

  • Temperature up to 100°C operating temperature
  • 10 ¯⁹ CC/S or less He leak rate
  • Straight thread, BSPP, with Hex
  • 250V 4 Amp
  • 304 Stainless Steel Material
  • 5-Pin with a 90⁰angle

BCE
+1 510-274-1990

Wednesday, April 28, 2021

850º C Copper Molybdenum (CuMo) Vacuum Heater Chuck

850º C Copper Molybdenum (CuMo) Vacuum Heater Chuck

Vacuum Chuck Heater with Higher Temperature Capability Than Aluminum and Better Uniformity Too!

In a recent test the BCE Copper Molybdenum (CuMo) Vacuum Heater Chuck performed admirably past its stated rating of 850º C up to 900º C during ramp-up and heater stabilization. 

The BCE Copper Molybdenum capability of 850º C clearly outperforms aluminum heater chucks temperature threshold of 450º C by a large margin, and also provides the benefit of more uniform heat distribution. 

For more information contact BCE. Call them at 510-274-1990 or visit this web page.

Wednesday, April 14, 2021

200mm 8” Copper Molybdenum (CuMo) Vacuum Heater Chuck

Vacuum Heater Chuck

BACKGROUND

Having better uniformity specifications than aluminum with a higher temperature threshold, the Copper Molybdenum (CuMo) Vacuum Heater Chuck displayed stellar performance during ramp-up and heater stabilization. Thermal conductivity (TC) typically 210 to 255 W/m.K (with rolling process) compared to Aluminum at 205 W/m.K. Using a compressed style configuration, we utilized a 304 stainless steel bottom housing since the uniformity requirement was top end specific. This increased heat transfer towards the top CuMo side while reducing customer cost.

200mm 8” Stainless Vacuum Heater Electrical and Performance Specs:

  • High temperature up to 850°C
  • Temperature uniformity 550⁰C (+/-3⁰C)
  • 108 mtorr, pass best config. baseline (~0.4 torr/min)
  • 120 Volt or 208 Volt Up to 750 Watt (+/-10%)
  • External thermocouple optional
  • Surface Finish: As per customer specification
BCE
510-274-1990

Saturday, January 16, 2021

150mm 6” Stainless Vacuum Heater Chuck

150mm 6” Stainless Vacuum Heater Chuck

BACKGROUND

An ALD chamber needed to be upgraded to a higher temperature platen, beyond the limits of aluminum.  The application involved reducing the cost of a replacement vacuum heater while keeping the heat transfer and uniformity the same or better in vacuum.  Vacuum integrity was crucial to the success of the project since it needed to comply with the existing vacuum heater chuck being replaced. 

SCOPE

  • 150mm 6” Stainless Vacuum Heater following specs: 
  • Temperature up to 450°C (+/- 1%) 30 minutes or less  
  • 304 SS 2.75 CF Flange Feedthrough with Viton O-ring  
  • 108 mtorr, pass best config. baseline (~0.4 torr/min) 
  • 120 Volt, 950 Watt (+/-10%), 8 Amp 
  • Thermocouple built-in to heater source
  • Surface Finish: 32 Ra 

OUTCOME

  • BCE 6” Vacuum Heater Chuck
  • Medium vacuum compatible
  • Leak-up rate test for the best tool config (~0.4 torr/min).
  • Good temperature uniformity over 6” dia, up-to 450°C.
  • Within ± 2.5°C over most of the wafer, except the edges of a 6” dia.
  • Repeatable and Predictable temperature  ramps up-to 450°C

BCE
510-274-1990

Sunday, January 10, 2021

120-volt Socket Vacuum Feedthroughs

120-volt Socket Vacuum Feedthroughs

Vacuum equipment usually requires transferring electrical currents, voltages, and signals or fluids through the equipment walls. BCE provides a wide range of feedthroughs that serve as solutions to various requirements for vacuum equipment installations.

One unique design is the 120-volt Socket Feedthrough. It's designed to replace bulky power wiring and reduce clutter located in and around a vacuum chamber.  A three-slot single female receptacle precisely fitted into an adapter with a KF50 flange or 1-1/4" NPT connection. This feedthrough is an optimal solution to reduce the size and increase efficiency. With this design, users can relocate the power system to the chamber's exterior, increasing the available space within the vacuum chamber while maintaining the desired vacuum rating.

BCE's epoxy chemical adhesion, the most robust mechanism of any adhesive bond, make the seal possible.  The viscoelastic nature of the epoxy absorbs vibrations and allows for a better performance by reducing fatigue.

BCE's innovative product is just what you need for a fast and easy 120-volt socket available on the other side of the vacuum wall. They provide a standard 120V, 15 amp socket for a quick, reusable connection. Custom configurations are available.

BCE
510-274-1990

Friday, December 18, 2020