Industrial & semiconductor applications require high heat in a centralized location. BCE designed a heater platen with the goal of 900⁰C operation, fast ramp & soak of at least 800⁰C. When tested in our BCE Lab in Hayward California, we were able to push this heater further and achieved upwards of 1,050°C
Ramp Time:
- Test#1 23°C to 800°C, 29 Min. (without Insulation)
- Test#2 23°C to 800°C, 13 Min. (with 2" Insulation)
- Test#3 23°C to 900°C, 17 Min. (with 2” Insulation)
- Test#4 23°C to 950°C, 18 Min. (with 2” Insulation)
- Test#5 23°C to 1,000°C,19 Min. (with 2” Insulation)
Temperature Uniformity:
After the heater stabilized from 800⁰C to 950⁰C, the surface thermocouple on the edge to the internal thermocouple (approximately 180⁰ away), there was a 1% to 2% delta.
Scope:
- Material: 304 Stainless Steel with Inconel Heat Source
- Stainless Steel CF or KF flanges of various sizes, with heat sink near heater outlet
- 200mm Ø x 0.50” Thick
- Vacuum, He Leak Test available
- 700VDC, Hi-pot, 1mA current leakage
- 5mΩ @ 500VDC prior to shipping
Ramped heater from 23°C to 1,000°C in 19 min. under 2” thick ceramic fiber insulation. The heater was held at this temperature for 1 hour, and it intermittently hit 1,050°C.
BCE does not recommend operation above 900C as this can drastically impact the life of the assembly. Furthermore, high-temperature operations should be in a vacuum/oxygen-free environment, and use of insulation is advised.
BCE Mfg.
21060 Corsair Blvd. Hayward, CA 94545
510-274-1990
https://bcemfg.com