
A
semiconductor wafer platform, know as a chuck, is used to support and hold in place (usually by means of applied vacuum), a silicon wafer. A
chuck heater is used to uniformly and accurately distribute heat (and cooling) to a semiconductor wafer chuck. This is done during the manufacturing, characterization, testing, and failure analysis of semiconductor wafers.
Semiconductor wafers contain many electronic devices or electronic circuits, known as dies. Each die has to be carefully tested through a range of temperatures. Precise and uniform temperature control is a requirement. The simplest, and most common way to apply heat (and cooling) is through a chuck incorporating an electric resistance heating element.