BACKGROUND
Heating solution for an ALD Vacuum Chamber Heater testing 6” (152mm) wafers up to 450⁰C. There were obvious space constraints at the customer site requiring an extended sleeve of 25”. The extra-long length enabled the placement of the wafer on the top surface eliminating the need to modify the existing chamber.
SCOPE
The Vacuum Pedestal Heater needed to satisfy the following:
- Temperature 450⁰C
- 25” Long sleeve with 2.75 CF Flange on the bottom
- Body must pass Helium Leak rate of 1 x 10̄¯9 cc/sec He
- 6” overall diameter for 6” (152mm) wafers
- Top surface must have a flatness of ± .005”
- Thermocouple for additional temperature measurement
- 1,000 Watt (± 10%) , 120 Volt
- Material was 304 Stainless Steel
OUTCOME
The Vacuum Pedestal Heater was ramped in atmosphere to 450⁰C in approximately 45 minutes. Due to the 360⁰ weld, there was some deflection on the top surface causing it to be out of tolerance. After the 450⁰C ramp, the Vacuum Pedestal Heater was polished down to below ± .005”. A leak test was performed to spec and cleaned to high purity standards then shipped in clean room bags.